Alignment + Exposure + UV Bonding
up to 200 mm 

SUSS MicroTec offers a wide product portfolio of high quality process solutions for the semiconductor industry and related markets. SUSS portfolio covers a comprehensive range of products and solutions for backend lithography, wafer bonding, and photomask processing, complemented by micro-optical components. 

SUSS MicroTec / KARL SUSS

MA200 COMPACT

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- Automatic Mask Aligner
- Top Side Alignment (TSA)
- 4" Vacuum Chuck (inquire for other sizes)
- 5" x 5" Mask Holder (inquire for other sizes)
- Up to 8"/200mm wafer capable
- Cassette to Cassette Operation
- Pre-Aligner: Through and Reflective Sensor
- UV400 High Resolution Optics
- Robot: Genmark GB4
- 1000W Lamp House
- CIC1200 Power Supply
- Wafer Flat Check Camera Option Included
- Ring Field Illumination for TSA Option Included
- Isolation table (included in main body)

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MA200 COMPACT

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SUSS MicroTec / KARL SUSS

MA200 COMPACT

SUSS MicroTec / KARL SUSS

MA200 COMPACT

SUSS MicroTec / KARL SUSS

MA200 COMPACT

SUSS MicroTec / KARL SUSS

MA200 COMPACT

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SUSS MicroTec / KARL SUSS

MA200 COMPACT