NV-MC3 300mm high tilt and medium current applications for all chips.

Designs, manufactures and services ion implantation and other processing equipment used in the fabrication of semiconductor chips.

AXCELIS

NV MC3

Need to repair: Gauge controller/Dry pump/In-air Transfer robot /Y-scan controller/E-chuck
Shut down in 2023
The tool will not include:
turbo pump
cryo pump
dry pump
compressor

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NV MC3

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NV MC3

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NV MC3

AXCELIS

NV MC3

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