NOVA

NOVASCAN 3090

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NOVA NOVASCAN 3090.pdf

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Critical Dimension (CD) and metrology system

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POL MEASUREMENT
Tool Status - Running Wafers

Asset Description: NOVA 3090 Next w/OCD 2D Option (AMAT) payment
Software Version: WIN XP, Nova 4.5R6b49
CIM: SECS
Process: (MOL, CA-POL) / (FEOL, STI-POL)

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