MACTRONIX

EUREKA UKA-650

Wafer Transfer Tool - Eureka III Sr. for 150mm Wafers

Automatic Wafer Transfer Station
Transfers Wafers Between one 25-slot Carrier and One 50 Slot Quartz Boat

Carriers/Boats can be Plastic, Teflon, Quartz, Silicon Carbide, Polysilicon and Metal

Air Operated

Minimized Wafer Contact

Preserved Flat Alignment

Hard Black Anodized Frame

Retainers Default to Closed Position to Prevent Dropping Wafers in the Event of Air Pressure Loss

Vacuum Sensors

Pressure: 70 to 90 PSI C.D.A. or N2

Vacuum: 20"-22" Hg

EUREKA UKA-650

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EUREKA UKA-650

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EUREKA UKA-650

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EUREKA UKA-650

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EUREKA UKA-650

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MACTRONIX

EUREKA UKA-650