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STS MULTIPLEX ICP
    Description
    M/PLEX Multiplex ICP Etcher
    Configuration
    Surface Technology Systems M/PLEX Multiplex ICP Etcher, 400V, 50Hz, 3ph, w/ MAG900CT turbopump. Includes power distribution & control rack cabinet, w/ power distribution, Electrogrip electrostatic driver, vAT PM-7 adaptive pressure controller, Leybold Mag Drive 1000 pump controller; ENI ACG-10B RF generator; ENI ACG-3B-06 RF generator; ENI VL-400 phase shift controller; PowerBright VC-2000 step-up/down transformer; BOC Edwards iQDP-80 roughing pump, code# A532-80-905; Neslab RTE-211 recirculating chiller, BOM# 135103200702; gas cabinet; LEP300 control server. Configured for 3in substrates.
    OEM Model Description
    The STS MULTIPLEX ICP is an etch system. The STS MULTIPLEX ICP can be used with 2” wafer sizes. It has a silicon material plate and ASE polymer system processer.
    Documents

    No documents

    STS

    MULTIPLEX ICP

    verified-listing-icon

    Verified

    CATEGORY
    Dry / Plasma Etch

    Last Verified: Over 30 days ago

    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    126234

    Wafer Sizes:

    3"/75mm

    Vintage:

    2001

    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
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    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/f8f98df8da02487f81986f01873e449c_70d7632d7b5340929fb3c9a95e59480b1201a_mw.jpeg
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    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/3b18b181c4914e6e88e7888c09d2ae85_8f885e11e8134899a3f23e3034aa7d501201a_mw.jpeg
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    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/2c39b177d9d44ed6b377ecd31ce5384d_1e984af57083490fbb62cdff9be935db1201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/67eecb0758b84945940a4cdf12a9fb5e_53cdf9e9d4ed435ea6e308c1737328e11201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/1da8f408395c4533aec36ce5196aac9c_509aba605b314eeba916b76198f703501201a_mw.jpeg
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    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/297dd031a24c484390128e114c107270_91047be71549484d916b29028df81cea1201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/317bd7263e4e404bb11a0b9a795a347a_1f2d4b93cdde40c3a96857c926d146d91201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/c94f07df2c2344629da88b02725ad74d_9076bf11bfaa4913b3b092bc1ba82c3d1201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/3ce95f259a414733ba2253905f40e07a_758f6bb6b9784418b1aaa20b8ab87d0b1201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/aca0fd534e4d496db634b1073abdd46c_4fd7f4efcafa4ebeaf7202457adf53c11201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/b6cc2d7837e040bbba8c5a5e384322a2_7e9ed2ded14646d5982fde762b8c55411201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/fb2cbfd90a3d44b199cd05bc7de748d0_c82dd46b64ad40a9b5063c090f1da7141201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/88e4597e8d3a4073b802cab02d8bbbe6_b85420bef06447e18da24e80c7504ebd1201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/004ffbd3b8fa49f685bd3821f9ff41f1_84f7d9c08bf043829d5fffa85d8138951201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/510241e80c55490d95805e6ba1f4506a_622d0b7a448f4575935e088b4d6098311201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/ec3c5a25bdda43bf87708294029811af_3fe9376294064cdb8ca1ed9eab019f961201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/bff78fdf52cc4f829ef0a2bb9c46a296_68ffbe043e0f48c19d184cffb53c91a71201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/719c3c19d8fa424dab807d8df867ab6c_a74a12062afc48abb619d9058e30230d1201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/e2aec40c0f404a66abcaced834a1bb93_191ee820c65345e18a8523c4ee8a962a1201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/05ec7435845543d8a3c043e291e76429_f89cf8bdf59e49b986cb34101ea75a1e1201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/17610c2d0b854a078abea59109c63058_72c84bd38d6f4568b75b398b2ea6ed801201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/aa6167a1ad074c72a242adce679f156f_d145efc6497f4d779582f7926b9059711201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/80f036408778434c8a50cf4d2f4faa83_90ad1744f8954173bc29ec4615c7a21f1201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/352190bdc3924966b349f0660fed1a8f_43f738c649834e1db76723fe810b3a961201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/4cf1831fff3d42c59ec4b434825f232f_6b1ce367026c4f3f86da4a68712c14dd_mw.png
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/b7b8994ddadc4222b8eba79b240cc421_b630245d92554389b21fe42d914985c01201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/a3c032bb33ba45fcba08ba692c4a6348_37739a83bb8a4823939feadb5d8e3a5a1201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/265d5b07c8ad46a98681c5b4c8555ba6_27b6d0465e44470abce66528c558e5c61201a_mw.jpeg
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    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/9d960bcd09654da0934ac15fa1a4b876_17afdcc40dd5459eb46f31b41b04c9561201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/1e0b227f43314e019ff5c07c7d024492_e8e27914f5394cf5b2c5bf181a6c2d001201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/40d114e0300b4e639213d26656cf8aad_f91bb9a2dc34460aaa8ee718002929141201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/294f9a9ef75746fb892fcac6ffd490e9_731c9f3b1c1c4fff88da66c4fb6c67561201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/7e4064d7c2104b72a8e0c367ffeff295_843e9a20b3eb4122bc3defd638f073de1201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/4a05ea64747844b18c0bcb486e3a5de7_bb44cf42b21342cd8a88f6a9e4c8b9da1201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/29d6f8cf90224aeca78bd870e44c0750_830038abffb646328a19a22c6d9767c01201a_mw.jpeg
    listing-photo-4d88114f8be44392b953179a06f55be8-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/2077/4d88114f8be44392b953179a06f55be8/1e82bf504b9a43c6b29af2269fd1b205_d7715045384546c0ad747a188a7d77591201a_mw.jpeg
    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    126234

    Wafer Sizes:

    3"/75mm

    Vintage:

    2001

    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    M/PLEX Multiplex ICP Etcher
    Configuration
    Surface Technology Systems M/PLEX Multiplex ICP Etcher, 400V, 50Hz, 3ph, w/ MAG900CT turbopump. Includes power distribution & control rack cabinet, w/ power distribution, Electrogrip electrostatic driver, vAT PM-7 adaptive pressure controller, Leybold Mag Drive 1000 pump controller; ENI ACG-10B RF generator; ENI ACG-3B-06 RF generator; ENI VL-400 phase shift controller; PowerBright VC-2000 step-up/down transformer; BOC Edwards iQDP-80 roughing pump, code# A532-80-905; Neslab RTE-211 recirculating chiller, BOM# 135103200702; gas cabinet; LEP300 control server. Configured for 3in substrates.
    OEM Model Description
    The STS MULTIPLEX ICP is an etch system. The STS MULTIPLEX ICP can be used with 2” wafer sizes. It has a silicon material plate and ASE polymer system processer.
    Documents

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