Description

WBLL, 3chamber EPI, Cooldown, HP+ Robot

Configuration

Centura HTF EPI 8" w/ 3 chambers Config attached.

OEM Model Description

The Centura EPI is a state-of-the-art system that offers the advantages of single-wafer, multi-chamber design for epi deposition. This advanced system provides high throughput, lower cost of ownership benefits, and advanced robotics. The Centura EPI has recently undergone productivity enhancements, including the new AccuSETT remote system for accurate stepper enhanced thickness and In-Line Metrology for integrated FTIR in the cooldown chamber. These enhancements make the Centura EPI an even more powerful tool for epi deposition.

Documents

CENTURA EPI HTF 3CH.pdf

APPLIED MATERIALS (AMAT)

CENTURA EPI

Verified

Epitaxial deposition (EPI)

Last Verified: 20 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

111416

Wafer Sizes:

8"/200mm

Vintage:

2006

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Refurbishment Services

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