Description
Indy Plus I-M ALD NIT / Indy Plus I-M USIO / Indy Plus B-M ALD LTO520 SiO2 ----> TEOSConfiguration
INDY Plus-B-M / Indy Plus IRodOEM Model Description
TELINDY PLUS™ is a cutting-edge thermal processing technology that combines the best features of the TELFORMULA™ minibatch system and the previous generation TELINDY™ platform. It offers improved process performance and productivity, with new enhancements such as improved maintenance access, dry gas chamber cleaning, and low O2 environment loading area control. These features contribute to yield increases by managing small particles more effectively. The highest levels of productivity are achieved by combining a 125 wafer load size with TEL’s FTPS™ responsive heater and a dual boat system option. TELINDY PLUS™ can be used for a wide range of applications, from traditional silicon treatments to leading edge ALD processes and radical oxidation. It represents the convergence of demonstrated experience and advanced technology, making it a powerful tool for thermal processing.Documents
No documents
PREFERRED
SELLER
Verified
CATEGORY
Furnaces / Diffusion
Last Verified: Over 60 days ago
Buyer pays 12% premium of final sale price
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
103866
Wafer Sizes:
12"/300mm
Process:
Indy Plus I-M ALD NIT / Indy Plus I-M USIO / Indy Plus B-M ALD LTO520 SiO2 ---> TEOS
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Similar Listings
View All
PREFERRED
SELLER
TEL / TOKYO ELECTRON
TELINDY PLUS
CATEGORY
Furnaces / Diffusion
Last Verified: Over 60 days ago
Buyer pays 12% premium of final sale price
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
103866
Wafer Sizes:
12"/300mm
Process:
Indy Plus I-M ALD NIT / Indy Plus I-M USIO / Indy Plus B-M ALD LTO520 SiO2 ---> TEOS
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Indy Plus I-M ALD NIT / Indy Plus I-M USIO / Indy Plus B-M ALD LTO520 SiO2 ----> TEOSConfiguration
INDY Plus-B-M / Indy Plus IRodOEM Model Description
TELINDY PLUS™ is a cutting-edge thermal processing technology that combines the best features of the TELFORMULA™ minibatch system and the previous generation TELINDY™ platform. It offers improved process performance and productivity, with new enhancements such as improved maintenance access, dry gas chamber cleaning, and low O2 environment loading area control. These features contribute to yield increases by managing small particles more effectively. The highest levels of productivity are achieved by combining a 125 wafer load size with TEL’s FTPS™ responsive heater and a dual boat system option. TELINDY PLUS™ can be used for a wide range of applications, from traditional silicon treatments to leading edge ALD processes and radical oxidation. It represents the convergence of demonstrated experience and advanced technology, making it a powerful tool for thermal processing.Documents
No documents
Similar Listings
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