Description
Overlay Measurement SystemConfiguration
No ConfigurationOEM Model Description
The Archer 10XT is an Automated Optical Overlay Metrology product that enables control of overlay error budget for sub-90-nm production. It provides a significant increase in throughput, precision, and TIS variability over previous generation systems. The system is user-friendly and has a competitive cost-of-ownership for 300-mm manufacturing at the sub-90-nm node. It integrates with KLA-Tencor’s software management products to provide comprehensive optical overlay metrology process control.Documents
No documents
Verified
CATEGORY
Overlay
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
104561
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
ARCHER 10 XT
CATEGORY
Overlay
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
104561
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Overlay Measurement SystemConfiguration
No ConfigurationOEM Model Description
The Archer 10XT is an Automated Optical Overlay Metrology product that enables control of overlay error budget for sub-90-nm production. It provides a significant increase in throughput, precision, and TIS variability over previous generation systems. The system is user-friendly and has a competitive cost-of-ownership for 300-mm manufacturing at the sub-90-nm node. It integrates with KLA-Tencor’s software management products to provide comprehensive optical overlay metrology process control.Documents
No documents