Description
i-line stepperConfiguration
Known issues: Chamber refrigeration unit - IATC temperature abnormality: refrigerant gas leak or compressor failure (internal valve crack: reduced compression capacity) Main computer: Hybrid VAX V3 with CHARON VAX Hard disk: Installed Disk drive: DAT tape Wafer stage: 6” chuck Reticle alignment: ISS / SRA / VRA Wafer alignment: LSA / FIA Auto focus: Multi Wafer loader: Type 3 OF type: Flat Flatzone direction: 6 o’clock In-line: Left Cassettes: Right / extra Control rack position: Right Reticle loader: 5” reticle size; expansion library; 24 slots PPD: Installed Barcode system: Installed Environment chamber: Asahi N2E-A Refrigerant: R-407C Illumination: SLOT1, CONV ID; L-NA 0.50; I-NA 0.38 Hg lamp illumination: 944.356 mW/cm² average Wafer local flatness: 0.600 µm Stepping: X 3σ 0.019 µm; Y 3σ 0.017 µm; X backlash 3σ 0.026 µm; Y backlash 3σ 0.014 µm Software: MCSV Ver.242B; OCSV Ver.242; TOOL Ver.251A Base kit: BASE7B111-0302C Reticle barcode reader: Nikon Code Alignment sensors: LSA / FIA Workstation: Hybrid VAX V3 with CHARON VAX Environment chamber: N2E-A; dated 5/1998OEM Model Description
"This i-line stepper from Nikon is one of our most popular lithography systems. Resolution ≦ 350 nm, exposure light source i-line (365 nm wavelength), reduction ratio 1:5, exposure field 22mm square to 17.9 (H) × 25.2 (V) mm (6-inch reticle), 20.0 × 20.4 mm (5-inch reticle), alignment accuracy (EGA, |M| + 3σ) ≦ 55 nm. The NIKON NSR 2205 i12D is a Steppers and Scanners system. The NSR 2205 i12D can be used with 8” wafer sizes.Documents
No documents
Verified
CATEGORY
Steppers & Scanners
Last Verified: 3 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
153255
Wafer Sizes:
6"/150mm
Vintage:
1999
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
NIKON
NSR-2205i12D
CATEGORY
Steppers & Scanners
Last Verified: 3 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
153255
Wafer Sizes:
6"/150mm
Vintage:
1999
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
i-line stepperConfiguration
Known issues: Chamber refrigeration unit - IATC temperature abnormality: refrigerant gas leak or compressor failure (internal valve crack: reduced compression capacity) Main computer: Hybrid VAX V3 with CHARON VAX Hard disk: Installed Disk drive: DAT tape Wafer stage: 6” chuck Reticle alignment: ISS / SRA / VRA Wafer alignment: LSA / FIA Auto focus: Multi Wafer loader: Type 3 OF type: Flat Flatzone direction: 6 o’clock In-line: Left Cassettes: Right / extra Control rack position: Right Reticle loader: 5” reticle size; expansion library; 24 slots PPD: Installed Barcode system: Installed Environment chamber: Asahi N2E-A Refrigerant: R-407C Illumination: SLOT1, CONV ID; L-NA 0.50; I-NA 0.38 Hg lamp illumination: 944.356 mW/cm² average Wafer local flatness: 0.600 µm Stepping: X 3σ 0.019 µm; Y 3σ 0.017 µm; X backlash 3σ 0.026 µm; Y backlash 3σ 0.014 µm Software: MCSV Ver.242B; OCSV Ver.242; TOOL Ver.251A Base kit: BASE7B111-0302C Reticle barcode reader: Nikon Code Alignment sensors: LSA / FIA Workstation: Hybrid VAX V3 with CHARON VAX Environment chamber: N2E-A; dated 5/1998OEM Model Description
"This i-line stepper from Nikon is one of our most popular lithography systems. Resolution ≦ 350 nm, exposure light source i-line (365 nm wavelength), reduction ratio 1:5, exposure field 22mm square to 17.9 (H) × 25.2 (V) mm (6-inch reticle), 20.0 × 20.4 mm (5-inch reticle), alignment accuracy (EGA, |M| + 3σ) ≦ 55 nm. The NIKON NSR 2205 i12D is a Steppers and Scanners system. The NSR 2205 i12D can be used with 8” wafer sizes.Documents
No documents