Description

Etcher

Configuration

2 Chambers Chuck Size - 8" Open Cassette Port Brooks PRI Robot - LAUDA Heaters (QTY 6) - CHC (QTY 3)

OEM Model Description

The SEZ 223 is a spin-processing system designed for high throughput cleaning and film removal applications for semiconductor wafer processing. It has a robot that transports 200mm wafers from four cassettes to two identical process chambers, capable of applying up to three chemicals each. The system has an object-oriented software architecture with a Sematech compliant GUI and Touch Screen. It also has options like Offline process editor, Mini-Environment, DIW-Ozone Processing, SMIF, AGV, Frontside handling, Film Removal End Point Detection, and more. It supports applications such as Copper Backside & Wraparound Clean, Other Backside Metal Cleans, Backside Film Removal, Wafer Reclaim, Post-etch Polymer Removal, Oxide Etching, and Post-CMP-Cleaning.

Documents

No documents

LAM RESEARCH / SEZ

SP223

Verified

Wet Etch

Last Verified: 3 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

146874

Wafer Sizes:

8"/200mm

Vintage:

2006

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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