Description

P-5000 Mark II DLH SACVD

Configuration

CVD DxL SACVD TEOS SACVD (Chemical Vapor Deposition) Deposition Equipment Currently Configured for: 200mm Software: b6.02 MF: P5000 Mark II Qty 4 - DLH SACVD: TEOS Deposition Chuck: Anodized Aluminum MFCs: 24 Horiba Z500 Digital MFCs Robot: ROBOT ASSY 8 IN AMAT 5000 Dry Pumps: 4 IXH620, 1 Edwards IXL120 Chillers: AMAT Heatex 1 Edwards Atlas Abatement Upgrades: PLIS, V440 SBC Power glitch protection Known Missing Parts: Heater jackets, AI board Qty 1 ; Tool is not complete

OEM Model Description

The Applied Materials Precision 5000 CVD is a single system solution for depositing high-quality, low-temperature dielectric materials on semiconductor devices. It incorporates multi-step processes to provide enabling technology for void-free intermetal dielectric deposition with profile control. The system’s process flexibility over a wide range of applications reduces the number and types of machines required for CVD. This makes it an efficient and cost-effective solution for semiconductor manufacturing.

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APPLIED MATERIALS (AMAT)

P5000 CVD

Verified

CVD

Last Verified: Over 30 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

125401

Wafer Sizes:

4"/100mm, 6"/150mm, 8"/200mm

Vintage:

1995

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