Description

P-5000 Mark II MxP+ Dielectric

Configuration

Dielectric Etch Etch/Ash/Clean - Plasma Processing Currently Configured for: 200mm Software: 4.8_26 MF: P5000 Mark II Qty 1 - MxP WEB Qty 3 - MxP+ Dielectric ESC: Polymide Gases Used: N2, CF4, SF6, HBR, CL2, CHF3 MFCs: 19 DIgital MFC's Unit or Horiba Robot: ROBOT ASSY 8 IN AMAT 5000 Dry Pumps: 1-BA100, 3 DS80/250, 1-IQDP80/WSU151 Chillers: 2 Neslab 150, 1- Hx AMAT 0

OEM Model Description

The AMAT P5000 Etch is a magnetically enhanced reactive ion etching system (MERIE) with two functional process chambers (Chambers B & C). P5000 Chamber B is primarily used for etching silicon based dielectrics (silicon dioxide, silcon nitride, etc.) and some carbon based compounds (resist, poly imide, etc) while chamber C is mainly used for silicon etching with high selectivity to underlying dielectric such as silicon dioxide. The system can process only 4" wafers. Pieces have to be attached to a 4" wafer. Though the process chamber processes one wafer at a time, up to 25 wafers can be loaded per batch.

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APPLIED MATERIALS (AMAT)

P5000 ETCH

Verified

Dry / Plasma Etch

Last Verified: 26 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

125403

Wafer Sizes:

6"/150mm, 8"/200mm

Vintage:

Unknown

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